Preparation and Influencing Factors of Molybdenum Targets and Magnetron-Sputter-Deposited Molybdenum Thin Films

Publisher: Trans Tech Publications

E-ISSN: 1662-9752|2018|913|853-861

ISSN: 0255-5476

Source: Materials Science Forum, Vol.2018, Iss.913, 2018-03, pp. : 853-861

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Abstract