A Liquid-Surface-Based Three-Axis Inclination Sensor for Measurement of Stage Tilt Motions

Author: Shimizu Yuki   Kataoka Satoshi   Ishikawa Tatsuya   Chen Yuan-Liu   Chen Xiuguo   Matsukuma Hiraku   Gao Wei  

Publisher: MDPI

E-ISSN: 1424-8220|18|2|398-398

ISSN: 1424-8220

Source: Sensors, Vol.18, Iss.2, 2018-01, pp. : 398-398

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Abstract