Film formation from HMDSO: comparison of direct plasma injection with afterglow injection using an atmospheric pressure dielectric barrier discharge*

Publisher: Edp Sciences

E-ISSN: 1286-0050|79|2|20801-20801

ISSN: 1286-0042

Source: EPJ Applied Physics (The), Vol.79, Iss.2, 2017-07, pp. : 20801-20801

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