Dependence of boron incorporation in delta layers on CVD diamond growth process and misorientation angle

Author： Lobaev M.A.  

Publisher： Edp Sciences

E-ISSN： 2100-014x|149|issue|02014-02014

ISSN： 2100-014x

Source： EPJ Web of Conference, Vol.149, Iss.issue, 2017-08, pp. : 02014-02014

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