Express in-situ measurement of single crystal diamond growth/etching rate in microwave plasma: how to perform multiparametric kinetics study in one working day

Author： Ralchenko V.G.  

Publisher： Edp Sciences

E-ISSN： 2100-014x|149|issue|02001-02001

ISSN： 2100-014x

Source： EPJ Web of Conference, Vol.149, Iss.issue, 2017-08, pp. : 02001-02001

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