RF plasma generation in the chamber with the conducting walls

Author: Gavrikov Andey  

Publisher: Edp Sciences

E-ISSN: 2100-014x|157|issue|03062-03062

ISSN: 2100-014x

Source: EPJ Web of Conference, Vol.157, Iss.issue, 2017-10, pp. : 03062-03062

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Abstract