Piezoelectric Response Evaluation of ZnO Thin Film Prepared by RF Magnetron Sputtering

Publisher： Edp Sciences

E-ISSN： 2261-236x|109|issue|04001-04001

ISSN： 2261-236x

Source： MATEC Web of conference, Vol.109, Iss.issue, 2017-05, pp. : 04001-04001

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