Generating multi-component multi-layer coatings type mecraly using multi-cathode magnetron sputtering systems

Publisher： Edp Sciences

E-ISSN： 2261-236x|129|issue|02007-02007

ISSN： 2261-236x

Source： MATEC Web of conference, Vol.129, Iss.issue, 2017-11, pp. : 02007-02007

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