Integration of Electrodeposited Ni-Fe in MEMS with Low-Temperature Deposition and Etch Processes

Author: Schiavone Giuseppe   Murray Jeremy   Perry Richard   Mount Andrew R.   Desmulliez Marc P. Y.   Walton Anthony J.  

Publisher: MDPI

E-ISSN: 1996-1944|10|3|323-323

ISSN: 1996-1944

Source: Materials, Vol.10, Iss.3, 2017-03, pp. : 323-323

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Abstract