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Characteristics of Carrier Transport and Crystallographic Orientation Distribution of Transparent Conductive Al-Doped ZnO Polycrystalline Films Deposited by Radio-Frequency, Direct-Current, and Radio-Frequency-Superimposed Direct-Current Magnetron Sputtering

Author： Nomoto Junichi Inaba Katsuhiko Kobayashi Shintaro Watanabe Takeshi Makino Hisao Yamamoto Tetsuya

Publisher： MDPI

E-ISSN： 1996-1944|10|8|916-916

ISSN： 1996-1944

Source： Materials, Vol.10, Iss.8, 2017-08, pp. : 916-916

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