Comparison of Erosion Behavior and Particle Contamination in Mass-Production CF4/O2 Plasma Chambers Using Y2O3 and YF3 Protective Coatings

Author: Lin Tzu-Ken   Wang Wei-Kai   Huang Shih-Yung   Tasi Chi-Tsung   Wuu Dong-Sing  

Publisher: MDPI

E-ISSN: 2079-4991|7|7|183-183

ISSN: 2079-4991

Source: Nanomaterials, Vol.7, Iss.7, 2017-07, pp. : 183-183

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