An Integrated Microfabricated Chip with Double Functions as an Ion Source and Air Pump Based on LIGA Technology

Author: Li Hua   Jiang Linxiu   Guo Chaoqun   Zhu Jianmin   Jiang Yongrong   Chen Zhencheng  

Publisher: MDPI

E-ISSN: 1424-8220|17|1|87-87

ISSN: 1424-8220

Source: Sensors, Vol.17, Iss.1, 2017-01, pp. : 87-87

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Abstract