Topologically Optimized Nano-Positioning Stage Integrating with a Capacitive Comb Sensor

Author: Chen Tao   Wang Yaqiong   Liu Huicong   Yang Zhan   Wang Pengbo   Sun Lining  

Publisher: MDPI

E-ISSN: 1424-8220|17|2|257-257

ISSN: 1424-8220

Source: Sensors, Vol.17, Iss.2, 2017-01, pp. : 257-257

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