Highly Sensitive Sputtered ZnO:Ga Thin Films Integrated by a Simple Stencil Mask Process on Microsensor Platforms for Sub-ppm Acetaldehyde Detection

Author： Presmanes Lionel Thimont Yohann Chapelle Audrey Blanc Frédéric Talhi Chabane Bonningue Corine Barnabé Antoine Menini Philippe Tailhades Philippe

Publisher： MDPI

E-ISSN： 1424-8220|17|5|1055-1055

ISSN： 1424-8220

Source： Sensors, Vol.17, Iss.5, 2017-05, pp. : 1055-1055

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