Optimization of a VOC Sensor with a Bilayered Diaphragm Using FBAR as Strain Sensing Elements

Author： Guo Huihui   Guo Aohui   Gao Yang   Liu Tingting  

Publisher： MDPI

E-ISSN： 1424-8220|17|8|1764-1764

ISSN： 1424-8220

Source： Sensors, Vol.17, Iss.8, 2017-08, pp. : 1764-1764

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