Cleaning of High Aspect Ratio STI Structures for Advanced Logic Devices by Implementation of a Surface Modification Drying Technique

Publisher： Trans Tech Publications

E-ISSN： 1662-9779|2018|282|190-193

ISSN： 1012-0394

Source： Solid State Phenomena, Vol.2018, Iss.282, 2018-10, pp. : 190-193

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