Numerical simulation of the oxygen distribution in silicon melt for different argon gas flow rates during Czochralski silicon crystal growth process

Publisher： Edp Sciences

E-ISSN： 2261-236x|204|issue|05013-05013

ISSN： 2261-236x

Source： MATEC Web of conference, Vol.204, Iss.issue, 2018-09, pp. : 05013-05013

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