Growth of Ru₂Si₃ Polycrystalline Thin Films by Solid Phase Epitaxy in Ru-Si Amorphous Layers

E-ISSN： 1662-9507|2018|386|33-37

ISSN： 1012-0386

Source： Defect and Diffusion Forum, Vol.2018, Iss.386, 2018-11, pp. : 33-37

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