Characterization of energetic and thermalized sputtered tungsten atoms using tuneable diode-laser induced fluorescence in direct current magnetron discharge

Author: Desecures M   de Poucques L   Bougdira J  

Publisher: IOP Publishing

E-ISSN: 1361-6595|24|1|15012-15022

ISSN: 0963-0252

Source: Plasma Sources Science and Technology, Vol.24, Iss.1, 2015-02, pp. : 15012-15022

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Abstract