Characterization of thin-film thickness

Author: Pourjamal Sara   Mäntynen Henrik   Jaanson Priit   Hertwig Andreas   Manoocheri Farshid   Ikonen Erkki   Pourjamal Sara  

Publisher: IOP Publishing

E-ISSN: 1681-7575|51|6|S302-S308

ISSN: 0026-1394

Source: Metrologia, Vol.51, Iss.6, 2014-12, pp. : S302-S308

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