IR-enhanced Si reference detectors for one-step scale transfers from 300 nm to 1000 nm

Author: Eppeldauer G P   Larason T C   Houston J M   Vest R E   Arp U   Yoon H W  

Publisher: IOP Publishing

E-ISSN: 1681-7575|51|6|S252-S257

ISSN: 0026-1394

Source: Metrologia, Vol.51, Iss.6, 2014-12, pp. : S252-S257

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Abstract