Hydrofluorocarbon ion density of argon- or krypton-diluted CH2F2 plasmas: generation of CH2F+ and CHF2+ by dissociative-ionization in charge exchange collisions

Publisher： IOP Publishing

E-ISSN： 1361-6463|48|4|45202-45208

ISSN： 0022-3727

Source： Journal of Physics D: Applied Physics, Vol.48, Iss.4, 2015-02, pp. : 45202-45208

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