Depth-dependent crystallinity of nano-crystalline silicon induced by step-wise variation of hydrogen dilution during hot-wire CVD

Publisher： IOP Publishing

E-ISSN： 1742-6596|619|1|11-14

ISSN： 1742-6596

Source： Journal of Physics: Conference Series , Vol.619, Iss.1, 2015-06, pp. : 11-14

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