Publisher： John Wiley & Sons Inc
E-ISSN： 1096-9918|47|10|946-952
ISSN： 0142-2421
Source： SURFACE AND INTERFACE ANALYSIS, Vol.47, Iss.10, 2015-10, pp. : 946-952
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Abstract
In this paper, the amorphous carbon‐based coatings containing F and Si (a‐C:F:Si) are successfully fabricated using a plane hollow cathode plasma‐enhanced chemical vapor deposition method. The results show that the mechanical properties of these coatings, such as hardness, elastic modulus, friction and wear, are closely affected by the content of F and Si. We systematically examine the microstructure and composition of these coatings using SEM, XPS, AFM and Raman for understanding of the underlying frictional mechanism. Copyright © 2015 John Wiley & Sons, Ltd.
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