Synthesis of highly tetrahedral amorphous carbon by mixed-mode HiPIMS sputtering

Publisher: IOP Publishing

E-ISSN: 1361-6463|48|44|442001-442005

ISSN: 0022-3727

Source: Journal of Physics D: Applied Physics, Vol.48, Iss.44, 2015-11, pp. : 442001-442005

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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Abstract