Search for Effective Sites of Proximity Gettering Induced by Ion Implantation in Si Wafers with First Principles Calculation

Publisher： Trans Tech Publications

E-ISSN： 1662-9779|2015|242|271-276

ISSN： 1012-0394

Source： Solid State Phenomena, Vol.2015, Iss.242, 2016-02, pp. : 271-7

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Abstract

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