Impact of the Gate Material on the Deep Levels in a-Si:H/c-Si Metal-Insulator-Semiconductor Capacitors

Publisher: Trans Tech Publications

E-ISSN: 1662-9779|2015|242|61-66

ISSN: 1012-0394

Source: Solid State Phenomena, Vol.2015, Iss.242, 2016-02, pp. : 61-7

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Abstract