Abatement characteristics of N2O in low-pressure plasma reactor

Author： Hur M   Lee J O   Lee J Y   Kang W S   Song Y-H  

Publisher： IOP Publishing

E-ISSN： 1361-6595|25|1|15008-15016

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.25, Iss.1, 2016-02, pp. : 15008-15016

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Low-pressure plasma discharge of Ar/N2/CH4 ternary mixture: experimental simulation of Titan's atmosphere

By  

Journal of Physics: Conference Series , Vol. 511, Iss. 1, 2014-05 ,pp. : 296-299

IOP Publishing

Access to resources Recommend Favorite

Inactivation factors of spore-forming bacteria using low-pressure microwave plasmas in an N2 and O2 gas mixture

By  

New Journal of Physics, Vol. 11, Iss. 11, 2009-11 ,pp. : 1219-1233

IOP Publishing

Access to resources Recommend Favorite

Low-pressure nonequilibrium plasma for a top-down nanoprocess

By Makabe Toshiaki   Yagisawa Takashi  

Plasma Sources Science and Technology, Vol. 20, Iss. 2, 2011-04 ,pp. : 24011-24022

IOP Publishing

Access to resources Recommend Favorite

Diffusive decay of a low-pressure electronegative plasma

By Bogdanov E.   Kudryavtsev A.   Tsendin L.  

Technical Physics Letters, Vol. 27, Iss. 5, 2001-05 ,pp. : 373-377

MAIK Nauka/Interperiodica

Access to resources Recommend Favorite

Generation of plasma oscillations in a low-pressure microwave discharge

By Bystrov A.   Gildenburg V.  

Plasma Physics Reports, Vol. 27, Iss. 1, 2001-01 ,pp. : 68-75

MAIK Nauka/Interperiodica

Access to resources Recommend Favorite