Study of hysteresis behavior in reactive sputtering of cylindrical magnetron plasma

Author： Kakati H.   Borah S. M.  

Publisher： IOP Publishing

E-ISSN： 1741-4199|24|12|125201-125208

ISSN： 1674-1056

Source： Chinese Physics B, Vol.24, Iss.12, 2015-12, pp. : 125201-125208

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