Influence of Oxygen Flow Rate on the Characteristics of the Tungsten Oxide Using RF Magnetron Sputtering

Publisher: Trans Tech Publications

E-ISSN: 1662-7482|2015|773|657-661

ISSN: 1660-9336

Source: Applied Mechanics and Materials, Vol.2015, Iss.773, 2015-08, pp. : 657-661

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Abstract