Influence of Oxygen Flow Rate on the Characteristics of the Tungsten Oxide Using RF Magnetron Sputtering
Publisher: Trans Tech Publications
E-ISSN: 1662-7482|2015|773|657-661
ISSN: 1660-9336
Source: Applied Mechanics and Materials, Vol.2015, Iss.773, 2015-08, pp. : 657-661
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Abstract