Force Characterization of a Rotary Motion Electrostatic Actuator Based on Finite Element Method (FEM) Analysis

Publisher： Trans Tech Publications

E-ISSN： 1662-7482|2015|761|233-237

ISSN： 1660-9336

Source： Applied Mechanics and Materials, Vol.2015, Iss.761, 2015-06, pp. : 233-237

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