Subsurface imaging of metal lines embedded in a dielectric with a scanning microwave microscope

Author: You Lin   Ahn Jung-Joon   Obeng Yaw S   Kopanski Joseph J  

Publisher: IOP Publishing

E-ISSN: 1361-6463|49|4|45502-45512

ISSN: 0022-3727

Source: Journal of Physics D: Applied Physics, Vol.49, Iss.4, 2016-02, pp. : 45502-45512

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Abstract