Modeling and analysis of a novel combined peninsula–island structure diaphragm for ultra-low pressure sensing with high sensitivity

Author： Xu Tingzhong Zhao Libo Jiang Zhuangde Xu Yu Zhao Yulong

Publisher： IOP Publishing

E-ISSN： 1361-6463|49|7|75110-75135

ISSN： 0022-3727

Source： Journal of Physics D: Applied Physics, Vol.49, Iss.7, 2016-02, pp. : 75110-75135

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