Nucleation of microcrystalline silicon: on the effect of the substrate surface nature and nano-imprint topography

Author： Palmans J   Faraz T   Verheijen M A   Kessels W M M   Creatore M  

Publisher： IOP Publishing

E-ISSN： 1361-6463|49|5|55205-55215

ISSN： 0022-3727

Source： Journal of Physics D: Applied Physics, Vol.49, Iss.5, 2016-02, pp. : 55205-55215

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