Simulation of coupled sputter-diffusion effects

Author: von Toussaint U   Mutzke A   Sugiyama K   Schwarz-Selinger T  

Publisher: IOP Publishing

E-ISSN: 1402-4896|2016|167|14023-14031

ISSN: 1402-4896

Source: Physica Scripta, Vol.2016, Iss.167, 2016-02, pp. : 14023-14031

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract