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Publisher: IOP Publishing
E-ISSN: 1742-6596|643|1|61-65
ISSN: 1742-6596
Source: Journal of Physics: Conference Series , Vol.643, Iss.1, 2015-11, pp. : 61-65
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Plasma anodization of silicon at room temperature
Revue de Physique Appliquée (Paris), Vol. 16, Iss. 8, 1981-08 ,pp. :