DRIE process optimization to fabricate vertical silicon nanowires using gold nanoparticles as masks

Publisher: IOP Publishing

E-ISSN: 2043-6262|6|4|156-164

ISSN: 2043-6262

Source: Advances in Natural Sciences: Nanoscience and Nanotechnology, Vol.6, Iss.4, 2015-12, pp. : 156-164

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Abstract