Improved thermal isolation of silicon suspended platforms for an all-silicon thermoelectric microgenerator based on large scale integration of Si nanowires as thermoelectric material

Publisher： IOP Publishing

E-ISSN： 1742-6596|660|1|554-558

ISSN： 1742-6596

Source： Journal of Physics: Conference Series , Vol.660, Iss.1, 2015-12, pp. : 554-558

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