C-axis tilted AlN films for vibration energy harvesters

E-ISSN： 1742-6596|660|1|377-381

ISSN： 1742-6596

Source： Journal of Physics: Conference Series , Vol.660, Iss.1, 2015-12, pp. : 377-381

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Quantitative Ultrasonic Characterization of c-Axis Oriented Polycrystalline AlN Thin Film for Smart Device Application

By Habib A. Shelke A. Vogel M. Brand S. Jiang Xin Pietsch U. Banerjee S. Kundu T.

Acta Acustica united with Acustica, Vol. 101, Iss. 4, 2015-07 ,pp. : 675-683

S. Hirzel Verlag

Access to resources Recommend Favorite

Reliability of vibration energy harvesters of metal-based PZT thin films

Journal of Physics: Conference Series , Vol. 557, Iss. 1, 2014-11 ,pp. : 467-471

IOP Publishing

Access to resources Recommend Favorite

Thermal Conductivity of AlN and SiC Thin Films

By Choi Sun Kim Dongsik Choa Sung-Hoon Lee Sung-Hoon Kim Jong-Kuk

International Journal of Thermophysics, Vol. 27, Iss. 3, 2006-05 ,pp. : 896-905

Springer Publishing Company

Access to resources Recommend Favorite

White Noise Responsiveness of an AlN Piezoelectric MEMS Cantilever Vibration Energy Harvester

Journal of Physics: Conference Series , Vol. 557, Iss. 1, 2014-11 ,pp. : 178-182

IOP Publishing

Access to resources Recommend Favorite

Airflow energy harvesters of metal-based PZT thin films by self-excited vibration

Journal of Physics: Conference Series , Vol. 557, Iss. 1, 2014-11 ,pp. : 139-143

IOP Publishing

Access to resources Recommend Favorite