The Deposition of Silicon-Carbon Coatings in Plasma Based Nonself-Sustained Arc Discharge with Heated Cathode

Publisher: Trans Tech Publications

E-ISSN: 1662-9795|2016|685|643-647

ISSN: 1013-9826

Source: Key Engineering Materials, Vol.2016, Iss.685, 2016-03, pp. : 643-647

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Abstract