Design and Analysis of a Planar Piezo-Actuated Nanopositioner with Millimeter Scale Stroke

Publisher： Trans Tech Publications

E-ISSN： 1662-9795|2016|679|143-148

ISSN： 1013-9826

Source： Key Engineering Materials, Vol.2016, Iss.679, 2016-03, pp. : 143-148

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