Capacitive Properties of MIS Structures with SiO_x and Si_xO_yN_z Films Containing Si Nanoclusters

E-ISSN： 1661-9897|2016|39|162-168

ISSN： 1662-5250

Source： Journal of Nano Research, Vol.2016, Iss.39, 2016-03, pp. : 162-168

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