Design and realization of a photolithography alignment and uv exposure equipement for pedagogical and laboratory experiment purposes

Publisher： Edp Sciences

E-ISSN： 1638-5705|7|HORS SÉRIE 1|1033-1033

ISSN： 1638-5705

Source： J3eA - Journal sur l'enseignement des sciences et technologies de l'information et des systèmes, Vol.7, Iss.HORS SÉRIE 1, 2008-01, pp. : 1033-1033

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