Optical Diagnostics of RF Argon and Xenon Magnetron Discharges

Publisher： Edp Sciences

E-ISSN： 1286-4897|7|9|1869-1876

ISSN： 1155-4320

Source： Journal de Physique III, Vol.7, Iss.9, 1997-09, pp. : 1869-1876

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