Optimisation des conditions de fonctionnement d'un pilote plasma de 25 kW pour la purification du silicium

Publisher: Edp Sciences

E-ISSN: 1286-4897|5|5|585-604

ISSN: 1155-4320

Source: Journal de Physique III, Vol.5, Iss.5, 1995-05, pp. : 585-604

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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