Examination of Thin Film Uniformity at the Bottom of a Hole Structure Using a 3D Sputter Simulation Package

E-ISSN： 1286-4897|6|9|1213-1218

ISSN： 1155-4320

Source： Journal de Physique III, Vol.6, Iss.9, 1996-09, pp. : 1213-1218

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