Tuning the physical properties of amorphous In–Zn–Sn–O thin films using combinatorial sputtering

Publisher: Cambridge University Press

E-ISSN: 2159-6867|6|4|360-366

ISSN: 2159-6859

Source: MRS Communications, Vol.6, Iss.4, 2016-12, pp. : 360-366

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Abstract