Spatial phase-resolved optical emission spectroscopy for understanding plasma etching uniformity

Author: Milosavljević V.   Cullen P. J.  

Publisher: Edp Sciences

E-ISSN: 1286-4854|110|4|43001-43001

ISSN: 0295-5075

Source: EPL (EUROPHYSICS LETTERS), Vol.110, Iss.4, 2015-06, pp. : 43001-43001

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Abstract