Ion damage overrides structural disorder in silicon surface nanopatterning by low-energy ion beam sputtering

Author： Moreno-Barrado A.   Gago R.   Redondo-Cubero A.   Vázquez L.   Muñoz-García J.   Cuerno R.   Lorenz K.   Castro M.  

Publisher： Edp Sciences

E-ISSN： 1286-4854|109|4|48003-48003

ISSN： 0295-5075

Source： EPL (EUROPHYSICS LETTERS), Vol.109, Iss.4, 2015-02, pp. : 48003-48003

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