Micro-Raman study of the factors limiting the

$\rm TiSi_2\ C54$

phase formation in submicron patterns

Author： Meinardi F. Moro L. Sabbadini A. Queirolo G.

Publisher： Edp Sciences

E-ISSN： 1286-4854|44|1|57-61

ISSN： 0295-5075

Source： EPL (EUROPHYSICS LETTERS), Vol.44, Iss.1, 2010-03, pp. : 57-61

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